Completed Projects B2 SFB TR 87

Controlling the permeation of nanocomposite materials

Development of barrier/membrane coatings from silicon oxides with superior mechanical properties (internal stress, porosity, roughness, hardness), specific material composition (studied via FTIR, XPS), and excellent ductility (by embedding silicon nanoparticles in the SiOx matrix). The aim is to systematically investigate the parameter space for the production of nanocomposite layers as a balance between nanoparticle concentration, matrix layer material (SiOx, SiOCH, a-C:H, a-Si:H) and layer thickness. It is expected that a low density of nanoparticles will lead to a reduction of the stress in those layers.