Completed Projects C7 SFB-TR 87
Surface processes in the interaction of high-performance plasmas with HPPMS target surfaces and plastics
In a particle beam experiment, elementary plasma processes on surfaces are mimicked by sending quantified beams of atoms or ions to metal or plastic surfaces. By this, the production of secondary electrons, the reactive sputtering and layer growth is directly being investigated. Furthermore, the plasma activation of plastic surfaces, barriers and membranes will be analysed. In the in-vacuo XPS-HPPMS system, parameters of a HPPMS plasma can be linked to a XPS analysis of the target surface. Using grafted HPPMS targets, the spatial transport of metal atoms in the HPPMS plasmas is investigated. Different Al-Cr-Ti composite and powder metallurgically manufactured targets will be sputtered in reactive Ar/O2 gas mixture and then analysed. Plasma treatments with varying parameters are performed for different substrates and the respective effect of the plasma on the substrate surface is analyzed using XPS.
Videos
A video in German presenting the particle beam experiment can be found here:
A video in German presenting XPS chamber can be found here:
Funding
The work is funded by the German Science Foundation (DFG), SFB-TR 87, project C7